Fabrication of Ge2Sb2Te5 metasurfaces by direct laser writing technique

We experimentally demonstrate fabrication of the tunable high-contrast periodic metasurfaces from 150 nm thick Ge2Sb2Te5 films sputtered onto glass and sapphire substrates by exploiting direct laser writing technique. find that use substrate provides better accuracy metasurface segments due to higher thermal conductivity. The advantages demonstrated method are its simplicity, rapidity, robustness, ability tailoring dielectric properties fabricated structures. This is crucial importance for engineering robust applications in field telecommunications information processing.